Aberration-Corrected Four-Detector STEM-EDS Analysis of Embedded Nanoclusters
نویسندگان
چکیده
Examining small particles embedded in a specimen foil is a challenging application for analytical STEM methods. When the particles are ~2 nm or smaller and the foils must be prepared by FIB (which results in thicker foils and more surface damage), the challenges increase. Here we report the use of aberrationcorrected STEM, equipped with high-detection-efficiency EDS systems, and multivariate statistical analysis (MVSA) post-treatment analysis of the data, to analyze such particles.
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